Products
Highest uptime, lowest cost of ownership metrology systems in the industry.
Non-Contact Dimensional Metrology
Thickness, TTV, TIR, LTV, Bow, Warp, SORI, FPD, flatness
SigmaTech UltraMap-300
Wafers from 100mm to 300mm, Cassette to cassette or manual loading. Full SECS/GEM compatible.
Applications
High volume wafer production control, back-grinding control, Wafer characterization, extremely warp wafers, ultrathin wafers
SigmaTech UltraMap-TSV
Fully automated characterization of TSV and deep trench features on wafers up to 300mm
SigmaTech UltraMap-300IR
IR interferometry technology, Wafers 100mm to 300mm. Manual loading.
Applications
wafers on sawframe, SOI, multi-layers
SigmaTech 9600APBP
APBP (backpressure technology) Wafer 100mm to 300mm, Cassette to cassette or manual loading, SECS/GEM capable.
Applications
All non–silicon wafers, ceramics, glass, sapphire, non–controlled environments
SigmaTech UltraMap-200B
Benchtop system using dual WL chromatic coding probes for wafers up to 8” or square wafers and solar wafers 125mm and 156mm,Very flexible tool for thickness, TTV, Bow, Warp and also surface roughness measurement.
SigmaTech UltraMap-100B
Benchtop model
White light chromatic coding probes, Wafers 50mm to 100mm, Cassette to cassette or manual loading
Applications
Small wafers production control, SiC, Sapphire, Glass, InP
SigmaTech 9600M
APBP (backpressure technology) Manual system for wafer 50mm to 300mm.
Applications
Wafer thickness QA and R&D labs. All materials, all surfaces. Ultrathin material from 20um to 5mm.
SigmaTech customized systems
Metrology solutions with combined sensing technologies are available for a wide variety of non-standard applications.
Services
PM Service Agreements
SigmaTech service contracts are a promise of performance and uptime. The packages include a fast response to problems, prompt on-site service, and preventative maintenance to ensure accuracy and repeatability.
Our PM Service Agreement includes preventative maintenance service on a quarterly or semiannual basis, and can also be customized to meet your specific requirements. Our Maintenance-Free Packages give you years of worry-free operation and maximum uptime.
Metrology Services
SigmaTech offers lab services for your metrology needs with fast turnaround and low cost. We measure a wide range of substrates, up to 15mm in thickness and 300mm in diameter. These substrates can be of any material in which TTV, center bow, warp, or topographical mapping is required with sub-micron accuracy.