Applications

SigmaTech offers metrology solutions for a broad range of standard and specific applications in the field of semiconductor wafers, materials and optics.

• Conductive or non-conductive substrates
• Reflective or non reflective surfaces
• Polished or non polished wafers
• Wet or dry environments
• Round, square or rectangular shapes
• Sizes up to 300mm
• Non contact solutions with automated calibration

Standard Metrology Applications

• Wafer Characterization 2” to 12”
• Highly warped wafers (up to 10mm)
• Wafers on sawframe
• Ultrathin wafers/substrates
• Layer thickness measurements
• Solar cell metrology

Specific Applications – Surface Metrology

• TSV and deep trench mapping
• Membrane thickness measurement
• Roughness measurement
• Bump dimensions
• Surface structures