SigmaTech Metrology for Industry and Science
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Key Applications.

Sigmatech offers metrology solutions to a broad range of standard and specific applications in the field of semiconductor wafers, materials and optics.
Using multiple sensing technologies, they are virtually no limits to the capabilities:

  • Conductive or non-conductive substrates
  • Reflective or non reflective
  • Polished or non polished
  • Wet or dry environment
  • Round, square or rectangle
  • Sizes up to 600mm
  • Non contact solutions with automated calibration
Standard Applications Specific Applications top


SigmaTech metrology applications for:


Semiconductor Industry:

Silicon
GaAs
SiC, InP, GaN
Sapphire, Glass
SOI
Solar Cells
Multilayers, stacks
Wafer on sawframe
Transparent films
MEMS

Optics:

Lens Thickness
Lens RoC

Materials:

Ceramics
Graphite
Glass, Plastic

Measurements:

  • Thickness
  • TTV, TIR, LTV
  • WARP, Bow
  • Flatness
  • SORI
  • Roughness
  • Bumps
  • Solder ball
  • Cavities, holes
Developed by ZEMA
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