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  Sigmatech UltraSurf P:

Interferometric sensor for fast 3D measurements,
up to 200mm manual or motorized stage,
500um piezo scanner (2mm optional)
field of view: 130umx100um up to 2.5mmx1.9mm
Objectives: x2.5, x5, x10, x20, x50, x100
Vertical resolution: 1 Angstrom
Powerful 3D analysis software.

Applications: Industrial environment
Bump size, step height, film thickness, surface topography, roughness, MEMS (vibration analysis)

Option: Ask us about Integration of UltraSurf- P on UltraMap metrology systems for multifunction system capabilities
 


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