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Sigmatech UltraSurf SZ:
Fully automated optical profiling system for sub-nanometric measurement
Powerful analysis software.
500um piezo scanner (up to 2mm)
field of view: 80umx60um to 7.2mmx5.4mm
Objectives: x2.5, x5, x10, x20, x50, x100
Zoom: x.35 to x1.6
Vertical resolution: 1 Angstrom
200 and 300mm motorized translation stage
Applications: Automated optical profiling for R&D and production applications:
Step height, bump size, Roughness, surface topography, film thickness mapping |
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